Piezoelectric actuation of PZT thin-film diaphragms at static and resonant conditions

Piezoelectric actuation of PZT thin film diaphragms at static and resonant conditions

The piezoelectric response of silicon diaphragms covered with sputter-deposited PbZr0.45Ti0.55O3 (PZT) films has been investigated in view of their application in ultrasonic micro-actuators. The behaviour of resonance frequencies and quasistatic deflections has been studied as a function of membrane thickness and d.c. bias. The total stress in the films and the piezoelectric constant, d31, have...

PZT Thin-Film Meso- and Micro Devices

This paper consists of three major topics. The first topic is a review of challenges encountered in PZT thin film fabrication. Currently, sol-gel processing is one of the most promising techniques to fabricate PZT thin films. There are, however, several major challenges, including crack formation, thermally unstable electrodes, and poor piezoelectric properties. The second topic reveals some in...

Highly-efficient, flexible piezoelectric PZT thin film nanogenerator on plastic substrates.

A highly-efficient, flexible piezoelectric PZT thin film nanogenerator is demonstrated using a laser lift-off (LLO) process. The PZT thin film nanogenerator harvests the highest output performance of ∼200 V and ∼150 μA·cm(-2) from regular bending motions. Furthermore, power sources generated from a PZT thin film nanogenerator, driven by slight human finger bending motions, successfully operate ...

Piezoelectric Pressure Sensor Based on Enhanced Thin-Film PZT Diaphragm Containing Nanocrystalline Powders

Properties of piezoelectric PZT thin films for microactuator applications

The piezoelectric properties of lead zirconate titanate (PZT) thin films deposited on thick silicon substrates and thin silicon membranes were investigated using optical interferometry. The effect of the geometrical constraints and clamping effects on the piezoelectric response is discussed. The study of the dielectric permittivity and the loss as a function of the amplitude of the alternating ...